Der Artikel ist weiterhin als ^^OTHERCONDITION^^ verfügbar.
Autor: Cor Claeys
ISBN-13: 9783319939247
Einband: Book
Seiten: 438
Gewicht: 824 g
Format: 235x155x mm
Sprache: Englisch

Metal Impurities in Silicon and Germanium-Based Technologies

270, Springer Series in Materials Science
Origin, Characterization, Control and Device Impact
 Book
Vorbestellbar | Versandkosten
Erstverkaufstag: 01.09.2018
149,79 €*
4
Preface List of Symbols
List of Greek Symbols
List of Acronyms
3
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed.
Autor: Cor Claeys, Eddy Simoen
Eddy Simoen obtained his Bachelor's (1976-1978) and Master's degrees in Physics Engineering (1978-1980), as well as his Ph.D. in Engineering (1985), from Ghent University (Belgium). He is currently a Specialist at imec (Leuven, Belgium), involved in the study of defect and strain engineering in high-mobility and epitaxial substrates and defect studies in germanium and III-V compounds (AlN; GaN, InP, etc). Another current focus point is the study of 1-transistor memories based on bulk FinFET and Ultra-thin Buried Oxide (UTBOX) Silicon-on-Insulator (SOI), using low-frequency noise. In 2013, he was appointed a part-time Professor at Ghent University. He is a member of the IEEE and ECS and became an ECS Fellow in 2016.

Zu diesem Artikel ist noch keine Rezension vorhanden.
Helfen sie anderen Besuchern und verfassen Sie selbst eine Rezension.

 

Rezensionen

Autor: Cor Claeys
ISBN-13:: 9783319939247
ISBN: 3319939246
Erscheinungsjahr: 01.09.2018
Verlag: Springer-Verlag GmbH
Gewicht: 824g
Seiten: 438
Sprache: Englisch
Auflage 2018
Sonstiges: Buch, 235x155x mm, 75 schwarz-weiße Abbildungen, Bibliographie