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Autor: Cor Claeys
ISBN-13: 9783319939247
Einband: Book
Seiten: 438
Gewicht: 824 g
Format: 235x155x mm
Sprache: Englisch

Metal Impurities in Silicon and Germanium-Based Technologies

270, Springer Series in Materials Science
Origin, Characterization, Control and Device Impact
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Erstverkaufstag: 01.09.2018
149,79 €*
Preface List of Symbols
List of Greek Symbols
List of Acronyms
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed.
Autor: Cor Claeys, Eddy Simoen
Eddy Simoen obtained his Bachelor's (1976-1978) and Master's degrees in Physics Engineering (1978-1980), as well as his Ph.D. in Engineering (1985), from Ghent University (Belgium). He is currently a Specialist at imec (Leuven, Belgium), involved in the study of defect and strain engineering in high-mobility and epitaxial substrates and defect studies in germanium and III-V compounds (AlN; GaN, InP, etc). Another current focus point is the study of 1-transistor memories based on bulk FinFET and Ultra-thin Buried Oxide (UTBOX) Silicon-on-Insulator (SOI), using low-frequency noise. In 2013, he was appointed a part-time Professor at Ghent University. He is a member of the IEEE and ECS and became an ECS Fellow in 2016.

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Autor: Cor Claeys
ISBN-13:: 9783319939247
ISBN: 3319939246
Erscheinungsjahr: 01.09.2018
Verlag: Springer-Verlag GmbH
Gewicht: 824g
Seiten: 438
Sprache: Englisch
Auflage 2018
Sonstiges: Buch, 235x155x mm, 75 schwarz-weiße Abbildungen, Bibliographie